Horiba STEC Horiba Stec SEC-4400MC-SUC Mass Flow Controller SiH2Cl2 200CCM Used Working

**Precision Gas Control, Second to None – Your Reliable, Cost-Effective Solution for SiH2Cl2 Process Gas** In the high-stakes world of semiconductor manufacturing, every molecule counts. A slight deviation in gas flow can mean the difference between a perfect wafer batch and costly rejects. That's why engineers and procurement specialists trust Horiba STEC mass flow controllers for critical processes like chemical vapor deposition (CVD), epitaxy, and etching. Now, you can secure the same industry-leading performance – without the premium price tag – with this pre-owned, fully functional Horiba STEC SEC-4400MC-SUC mass flow controller, specifically calibrated for dichlorosilane (SiH2Cl2) at 200 CCM. **Why Choose This Pre-Owned MFC?** New mass flow controllers represent a significant capital investment. Our used SEC-4400MC-SUC offers a smart, budget-friendly alternative that doesn’t compromise on accuracy or reliability. Each unit is carefully inspected, tested, and verified to be in excellent working condition. You get proven Horiba STEC technology for a fraction of the cost, freeing up budget for other critical process equipment or consumables. This is ideal for startups, pilot plants, R&D labs, or production lines requiring spare units without the lead time and expense of new equipment. **Key Features & Benefits** - **Designed for SiH2Cl2 (Dichlorosilane):** This MFC is purpose-built to handle dichlorosilane, a common precursor in silicon epitaxy and dielectric film deposition. Its wetted materials and calibration are optimized for this corrosive, pyrophoric gas, ensuring long-term stability and minimal contamination. You gain peace of mind knowing the controller delivers precise, repeatable flows for your most sensitive processes. - **200 CCM Flow Range:** The 200 standard cubic centimeters per minute (CCM) range is perfect for low-flow applications common in single-wafer CVD, atomic layer deposition (ALD), and research chambers. This level of granularity allows for fine control of thin film thickness and composition, directly impacting device performance and yield. - **Proven Horiba STEC Reliability:** Horiba STEC is synonymous with accuracy and durability in the semiconductor industry. The SEC-4400MC series features a thermal mass flow measurement principle with a fast response time (typically <1 second) and excellent repeatability (within ±0.2% of full scale). You can trust that this controller will maintain set points with minimal drift over time. - **Cost-Effective Alternative:** Purchasing pre-owned equipment reduces upfront costs by 30-60% compared to new models. This is especially valuable for high-mix, low-volume fabs or university labs where budget constraints are tight. The savings can be redirected toward materials, process development, or additional tool upgrades. - **Easy Integration:** The SEC-4400MC-SUC utilizes standard analog or digital communication interfaces (typically 0-5 VDC or 4-20 mA) compatible with most gas delivery systems and process controllers. Its compact form factor fits seamlessly into existing gas panels or tool installations. No special adapters or software needed – just connect and start running. - **Pre-Tested & Guaranteed Functional:** Every unit undergoes rigorous functional testing including leak checks, flow accuracy verification against NIST-traceable standards, and valve actuation cycles. We provide documentation of test results upon request. You receive a fully operational MFC that is ready for immediate installation. **Use Cases & Problems Solved** - **Semiconductor CVD / Epitaxy:** Dichlorosilane is a key source gas for silicon epitaxial growth and silicon nitride deposition. Inconsistent SiH2Cl2 flow leads to uneven film thickness, poor step coverage, and increased defect density. This Horiba MFC ensures that your reactor receives the exact gas dose every time, improving yield and reducing rework. - **R&D & Pilot Lines:** Research environments often require flexible, low-volume gas delivery. A 200 CCM MFC is ideal for small-scale experiments where precise gas ratios are critical. Used equipment allows researchers to test new processes or materials without committing to a full-production-capital expenditure. - **Spare Parts & Backup Units:** Downtime in a fab is extremely costly. Having a spare MFC on hand can reduce tool recovery time from weeks to hours. This pre-owned unit serves as a reliable backup for your existing gas delivery system, ensuring continuity of operations even if a primary controller fails. - **Budget-Conscious Projects:** For start-ups or contract manufacturers scaling up production, managing cash flow is paramount. Choosing a used, high-quality MFC like this allows you to invest in other critical areas such as metrology, software, or facility upgrades while still maintaining process integrity. **Technical Specifications (Typical)** - Model: Horiba STEC SEC-4400MC-SUC - Gas: Dichlorosilane (SiH2Cl2) - Flow Range: 0 – 200 CCM (standard cubic centimeters per minute) - Accuracy: ±1% F.S. (Full Scale) - Repeatability: ±0.2% F.S. - Response Time: <1 second (typical) - Operating Pressure: Up to 150 psig (depending on gas and configuration) - Operating Temperature: 0°C to 50°C - Wetted Materials: Stainless steel, Viton, and other SiH2Cl2-compatible materials - Electrical Input: 24 VDC, 15 VDC (typical) - Signal Output: 0-5 VDC, 4-20 mA (selectable) - Communication: Analog (digital optional by model) - Condition: Used, fully tested and verified working Please note: This is a pre-owned unit. Some minor cosmetic wear may be present, but all functional components are in good working order. The controller has been cleaned and purged for safe handling. Calibration record available upon request. **What’s Included** - 1x Horiba STEC SEC-4400MC-SUC Mass Flow Controller (pre-tested, working) - Test report with flow accuracy data (if requested) - Protective packaging for safe shipment **Your Next Step – Secure Precision Flow Today** Don’t let budget constraints force you to compromise on process control. This Horiba STEC SEC-4400MC-SUC mass flow controller gives you the exact same performance as a brand-new unit at a fraction of the cost. Whether you are outfitting a new tool, replacing a failed unit, or building a spare parts inventory, this MFC is a smart, reliable choice. Stock is limited – used equipment in this condition doesn’t last long. Contact our sales team for a quote or to request additional testing details. Add this to your cart now and take the first step toward enhancing your gas delivery precision while staying within budget. Your process demands accuracy; we deliver it affordably.