Varian Varian SQ282 Vacuum ION Pump V.F.III Varian 54 LEINP KLA-Tencor eS31 Working

Are you struggling to maintain the ultra-high vacuum levels required for your semiconductor fabrication or research processes? The Varian SQ282 Vacuum Ion Pump offers a proven solution. Extracted from a fully functional KLA-Tencor eS31 system, this pump has been thoroughly tested and is ready to deliver exceptional performance in your own application. Whether you're running a critical etching step, a thin-film deposition process, or a high-sensitivity analytical instrument, a reliable vacuum pump is the backbone of your operation. The Varian SQ282 is not just any pump—it's a precision-engineered component designed by one of the most trusted names in vacuum technology, now available as a cost-effective, drop-in replacement that keeps your equipment running without the premium price tag. **Key Features and Benefits** - **Ultra-High Vacuum Performance** – This ion pump consistently achieves and maintains pressures in the 10⁻¹⁰ Torr range, ensuring a contamination-free environment for your most sensitive processes. The low energy particle bombardment mechanism eliminates harmful hydrocarbons and other contaminants, protecting your wafers, samples, or optical components. - **Proven Reliability** – Varian (now Agilent) has produced ion pumps for decades, and the SQ282 model is one of their most robust designs. With a solid-state high-voltage supply and a durable diode configuration, this pump offers long service intervals and minimal maintenance. The unit you're purchasing comes from a well-maintained KLA-Tencor eS31 tool, meaning it has already demonstrated its reliability in a demanding production environment. - **Cost-Effective Alternative** – Purchasing a brand-new OEM pump for your KLA-Tencor system can cost thousands of dollars. This tested working unit provides the same performance at a fraction of the cost—often saving you 60-80% compared to new. Your budget goes further, allowing you to allocate resources to other critical areas of your fab or lab. - **Drop-In Compatibility** – Designed with the Varian V.F.III (V-Flange III) 54 LEINP interface, this pump is a direct replacement for the original pump in KLA-Tencor eS31 systems. It also fits many other platforms using the same flange standard, including older Varian tools and custom research chambers. No complex modifications or adapters are required—simply swap and restart. - **Enhanced Uptime** – Vacuum pump failures are a leading cause of unplanned downtime in semiconductor manufacturing. With this fully tested SQ282, you can minimize tool idle time. Each unit undergoes a rigorous test protocol before shipment, including leak checking, voltage ramp, and pressure hold tests. You receive a pump that is ready to go from the moment it arrives. **Use Cases and Problems It Solves** The Varian SQ282 is ideal for any application requiring clean, stable, ultra-high vacuum. In semiconductor fabs, it is commonly used in etch tools, PVD chambers, CVD systems, and lithography tracks. It also excels in research environments such as surface science stations, electron microscopes, and particle accelerators where even minute gas molecules can ruin results. If you are experiencing vacuum degradation, rising base pressure, or sudden pump failure in your eS31 or similar system, this pump provides a quick and budget-friendly fix. It solves common issues like sputter contamination from failing pumps, difficulty reaching target pressure, and expensive emergency replacements. By choosing a pre-owned but fully functional unit, you also avoid the lead times associated with new pump orders—often weeks vs. days. **Technical Specifications** - **Model:** Varian SQ282 (also marked V.F.III 54 LEINP) - **Pump Type:** Sputter Ion Pump (Diode) - **Pumping Speed:** ~15 L/s for N₂ (typical); performance may vary slightly based on gas species - **Ultimate Pressure:** <5×10⁻¹⁰ Torr (with proper bakeout) - **Start Pressure:** 1×10⁻³ Torr or lower (requires roughing pump for initial evacuation) - **High Voltage:** 2.5 kV (DC, integrated power supply) – operates from standard 100–240 VAC - **Flange:** Varian V-Flange III (CF-compatible, 2.75” conflat) with 54 mm diameter - **Power Consumption:** Approximately 120 W during operation - **Condition:** Tested working, pulled from a fully functional KLA-Tencor eS31 tool; includes integrated HV cable (length ~1.5 m) - **Additional:** No magnet assembly required (integrated permanent magnet); weight approx. 3.5 kg - **Compatibility:** Direct replacement for KLA-Tencor eS31; compatible with many Varian VacIon series systems and custom chambers using V.F.III interface **What's Included** - 1 x Varian SQ282 Vacuum Ion Pump (V.F.III 54 LEINP) - 1 x Integrated high-voltage cable (tested for continuity) - 1 x Mounting hardware (flange gasket and bolts, if applicable – please verify with your configuration) - Test report showing pressure and current measurements at time of extraction **Why Buy From Us?** We specialize in refurbished semiconductor components, with a focus on KLA-Tencor and Varian spare parts. Every pump is visually inspected, electrically tested, and leak-checked to ensure reliable operation. Our team has decades of combined experience in semiconductor equipment maintenance, so you can trust that the pump you receive meets the same standards as a new unit. We offer a 30-day warranty against defects and technical support to help with installation. **Call to Action** Don't let vacuum pump issues delay your production. Invest in this reliable, cost-effective Varian SQ282 ion pump today. Click 'Add to Cart' and secure the performance your process demands. Limited stock available – act now. If you have any questions about compatibility or installation, feel free to message us – we're here to help you keep your tools running at peak efficiency.